Thorsten Lill
Impact in
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- Semiconductor materials and devices
- Plasma Diagnostics and Applications
- Advancements in Semiconductor Devices and Circuit Design
- Materials Chemistry top 10%
- Electronic and Structural Properties of Oxides
- Diamond and Carbon-based Materials Research
Papers in
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- Semiconductor materials and devices 44
- Plasma Diagnostics and Applications 24
- Advancements in Semiconductor Devices and Circuit Design 8
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- Electronic and Structural Properties of Oxides 16
- Diamond and Carbon-based Materials Research 6
- Co-authors
- Keren J. Kanarik (8 shared papers)Richard A. Gottscho (8 shared papers)Samantha Tan (7 shared papers)Vahid Vahedi (8 shared papers)Jeffrey M. Marks (4 shared papers)Eric A. Hudson (4 shared papers)Saravanapriyan Sriraman (1 shared paper)O. Joubert (10 shared papers)
- Journals
- Journal of Vacuum Science & Technology A Vacuum Surfaces and Films (19 papers)Chemistry of Materials (3 papers)Physical Review Letters (2 papers)Applied Physics Letters (1 paper)Journal of Applied Physics (1 paper)
- Partner nations
- United StatesFranceAustria
In The Last Decade
Thorsten Lill
52 papers receiving 1.5k citations
Thorsten Lill's Hit Papers
Peers
Comparison fields: 5 of 49
- Electrical and Electronic Engineering 1.3k
- Materials Chemistry 625
- Mechanics of Materials 328
- Electronic, Optical and Magnetic Materials 161
- Computational Mechanics 171
Countries citing papers authored by Thorsten Lill
This map shows the geographic impact of Thorsten Lill's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Thorsten Lill with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Thorsten Lill more than expected).
Fields of papers citing papers by Thorsten Lill
This network shows the impact of papers produced by Thorsten Lill. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Thorsten Lill. The network helps show where Thorsten Lill may publish in the future.
Co-authors
The 25 scholars most cited alongside Thorsten Lill, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.
All Works
Showing the 20 most-cited of 55 papers — load more, or switch the sort, to bring in the rest.
| # | Work | ||
|---|---|---|---|
| 1 | Overview of atomic layer etching in the semiconductor industry Hit paper breakdown → | 2015 | 504 |
| 2 | 2017 | 104 | |
| 3 | 2021 | 97 | |
| 4 | 2009 | 63 | |
| 5 | 2010 | 61 | |
| 6 | 2017 | 56 | |
| 7 | 1994 | 38 | |
| 8 | 2015 | 38 | |
| 9 | 2008 | 37 | |
| 10 | 2008 | 35 | |
| 11 | 2023 | 30 | |
| 12 | 2021 | 28 | |
| 13 | 2005 | 25 | |
| 14 | 2017 | 24 | |
| 15 | 2005 | 23 | |
| 16 | 2017 | 23 | |
| 17 | 1993 | 23 | |
| 18 | 2003 | 21 | |
| 19 | 2020 | 21 | |
| 20 | 2005 | 20 |
About Thorsten Lill
Thorsten Lill is a scholar working on Electrical and Electronic Engineering, Materials Chemistry, Computational Mechanics, Mechanics of Materials and Electronic, Optical and Magnetic Materials, having authored 55 papers that have together received 1.5k indexed citations. Recurring topics across this work include Semiconductor materials and devices (44 papers), Plasma Diagnostics and Applications (24 papers), Electronic and Structural Properties of Oxides (16 papers), Ion-surface interactions and analysis (8 papers), Advancements in Semiconductor Devices and Circuit Design (8 papers), Metal and Thin Film Mechanics (7 papers), Diamond and Carbon-based Materials Research (6 papers) and Copper Interconnects and Reliability (6 papers). The work is most often cited by research in Electrical and Electronic Engineering (1.3k citations), Materials Chemistry (625 citations), Mechanics of Materials (328 citations), Electronic, Optical and Magnetic Materials (161 citations) and Computational Mechanics (171 citations). Thorsten Lill has collaborated with scholars based in United States, France and Austria. Frequent co-authors include Keren J. Kanarik, Richard A. Gottscho, Samantha Tan, Vahid Vahedi, Jeffrey M. Marks, Eric A. Hudson, Saravanapriyan Sriraman, O. Joubert, Andreas Fischer and Steven M. George. Their work appears in journals such as Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, Chemistry of Materials, Physical Review Letters, Applied Physics Letters and Journal of Applied Physics.
Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.