Eric A. Hudson

103 papers receiving 5.8k citations

Eric A. Hudson's Hit Papers

Overview of atomic layer etching in the semiconductor industry 2015 · 479 citations
4790+3+7Years since publication100200300400

Peers

Eric A. Hudson
Comparison fields: 5 of 154
  • Inorganic Chemistry 1.1k
  • Radiation 467
  • Surfaces, Coatings and Films 322
  • Oncology 909
  • Materials Chemistry 1.4k
Replace Takashi Nakanishi with:
Takashi Nakanishi Japan
Takeshi Kasama Japan
Takashi Yamashita Japan
Zhonghou Cai United States
A. Marcelli Italy
Vladimir Baranov Canada
Jordi Rius Spain
Jacob M. Rowe United States
Michael A. Henderson United States
Jonathan P. Wright France
Eric A. Hudson relative to Takashi Nakanishi Japan Takashi Nakanishi's profile →
Citations per field
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Takashi Nakanishi · 1×
Citations per year

Countries citing papers authored by Eric A. Hudson

Since Specialization
Citations

This map shows the geographic impact of Eric A. Hudson's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Eric A. Hudson with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Eric A. Hudson more than expected).

Fields of papers citing papers by Eric A. Hudson

Since Specialization
Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Eric A. Hudson. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Eric A. Hudson. The network helps show where Eric A. Hudson may publish in the future.

Co-authors

The 25 scholars most cited alongside Eric A. Hudson, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.

Border = papers with Eric A. Hudson Line = papers co-authored together Eric A. Hudson links everyone, so they are left out of the graph.

All Works

20 of 20 papers shown

Showing the 20 most-cited of 106 papers — load more, or switch the sort, to bring in the rest.

#Work
1
Overview of atomic layer etching in the semiconductor industry
Hit paper breakdown →
2015479
2 2000443
3 2000351
4 1995339
5 2006243
6 2000217
7 1991186
8 1995164
9 1997163
10 1990158
11 1995150
12 1996146
13 1998145
14
Microsatellite instability occurs frequently and in both diploid and aneuploid cell populations of Barrett's-associated esophageal adenocarcinomas.
1994120
15 1999110
16 1993102
17 201798
18 201692
19 199579
20 199777

About Eric A. Hudson

Eric A. Hudson is a scholar working on Electrical and Electronic Engineering, Materials Chemistry, Molecular Biology, Atomic and Molecular Physics, and Optics and Mechanics of Materials, having authored 106 papers that have together received 6.0k indexed citations. Recurring topics across this work include Plasma Diagnostics and Applications (29 papers), Semiconductor materials and devices (27 papers), Advanced Chemical Physics Studies (13 papers), Metal and Thin Film Mechanics (12 papers), Radioactive element chemistry and processing (12 papers), X-ray Spectroscopy and Fluorescence Analysis (11 papers), Ion-surface interactions and analysis (10 papers) and Copper Interconnects and Reliability (7 papers). The work is most often cited by research in Inorganic Chemistry (1.1k citations), Radiation (467 citations), Surfaces, Coatings and Films (322 citations), Oncology (909 citations) and Materials Chemistry (1.4k citations). Eric A. Hudson has collaborated with scholars based in United States, Germany and Austria. Frequent co-authors include P. G. Allen, James H. Resau, E. R. Sylwester, D. A. Shirley, L. J. Terminello, G. S. Oehrlein, G. Kaindl, M. Domke, Jeffrey M. Marks and J. J. Bucher. Their work appears in journals such as Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, Physical review. B, Condensed matter, Physical Review A, Journal of Biological Chemistry and Inorganic Chemistry.

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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