Eric A. Hudson

103 papers receiving 5.9k citations

Eric A. Hudson's Hit Papers

Overview of atomic layer etching in the semiconductor industry 2015 · 504 citations
5040+3+7Years since publication100200300400500

Peers

Eric A. Hudson
Comparison fields: 5 of 155
  • Inorganic Chemistry 1.1k
  • Radiation 468
  • Surfaces, Coatings and Films 323
  • Oncology 855
  • Radiological and Ultrasound Technology 158
Replace Takashi Nakanishi with:
Takashi Nakanishi Japan
Zhonghou Cai United States
A. Marcelli Italy
Jordi Rius Spain
Jacob M. Rowe United States
Jon Dobson United Kingdom
Jonathan P. Wright France
T. Butz Germany
R. Abela Switzerland
Olivier Tillement France
Eric A. Hudson relative to Takashi Nakanishi Japan Takashi Nakanishi's profile →
Citations per field
00.5×3.7×
Takashi Nakanishi · 1×
Citations per year

Countries citing papers authored by Eric A. Hudson

Since Specialization
Citations

This map shows the geographic impact of Eric A. Hudson's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Eric A. Hudson with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Eric A. Hudson more than expected).

Fields of papers citing papers by Eric A. Hudson

Since Specialization
Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Eric A. Hudson. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Eric A. Hudson. The network helps show where Eric A. Hudson may publish in the future.

Co-authors

The 25 scholars most cited alongside Eric A. Hudson, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.

Border = papers with Eric A. Hudson Line = papers co-authored together Eric A. Hudson links everyone, so they are left out of the graph.

All Works

20 of 20 papers shown

Showing the 20 most-cited of 105 papers — load more, or switch the sort, to bring in the rest.

#Work
1
Overview of atomic layer etching in the semiconductor industry
Hit paper breakdown →
2015504
2 2000443
3 2000354
4 1995339
5 2006246
6 2000217
7 1991187
8 1995164
9 1997163
10 1990158
11 1995150
12 1996146
13 1998145
14
Microsatellite instability occurs frequently and in both diploid and aneuploid cell populations of Barrett's-associated esophageal adenocarcinomas.
1994119
15 1999111
16 2017104
17 1993103
18 201694
19 199579
20 199776

About Eric A. Hudson

Eric A. Hudson is a scholar working on Electrical and Electronic Engineering, Materials Chemistry, Molecular Biology, Atomic and Molecular Physics, and Optics and Mechanics of Materials, having authored 105 papers that have together received 6.0k indexed citations. Recurring topics across this work include Plasma Diagnostics and Applications (29 papers), Semiconductor materials and devices (27 papers), Advanced Chemical Physics Studies (13 papers), Radioactive element chemistry and processing (12 papers), Metal and Thin Film Mechanics (12 papers), X-ray Spectroscopy and Fluorescence Analysis (11 papers), Ion-surface interactions and analysis (10 papers) and Copper Interconnects and Reliability (7 papers). The work is most often cited by research in Inorganic Chemistry (1.1k citations), Radiation (468 citations), Surfaces, Coatings and Films (323 citations), Oncology (855 citations) and Radiological and Ultrasound Technology (158 citations). Eric A. Hudson has collaborated with scholars based in United States, Germany and France. Frequent co-authors include P. G. Allen, James H. Resau, E. R. Sylwester, D. A. Shirley, L. J. Terminello, G. S. Oehrlein, G. Kaindl, M. Domke, Jeffrey M. Marks and Samantha Tan. Their work appears in journals such as Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, Physical Review A, Physical review. B, Condensed matter, Langmuir and The Journal of Chemical Physics.

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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