Anthony Yen
Impact in
- Surfaces, Coatings and Films top 5%
- Optical Coatings and Gratings
- Electron and X-Ray Spectroscopy Techniques
-
- Advancements in Photolithography Techniques
- Integrated Circuits and Semiconductor Failure Analysis
- Semiconductor materials and devices
- Advancements in Semiconductor Devices and Circuit Design
Papers in
-
- Advancements in Photolithography Techniques 61
- Integrated Circuits and Semiconductor Failure Analysis 34
- Semiconductor materials and devices 10
- Photonic and Optical Devices 8
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- Electron and X-Ray Spectroscopy Techniques 20
- Optical Coatings and Gratings 13
- Co-authors
- Henry I. Smith (11 shared papers)James D. Klein (13 shared papers)K.K. Young (1 shared paper)Yao-Ching Ku (1 shared paper)C.H. Diaz (1 shared paper)D.A. Antoniadis (3 shared papers)Mark L. Schattenburg (5 shared papers)K. Ismail (3 shared papers)
- Journals
- Microelectronic Engineering (9 papers)Applied Physics Letters (4 papers)Journal of Applied Physics (4 papers)Journal of Micro/Nanolithography MEMS and MOEMS (3 papers)Journal of Vacuum Science & Technology A Vacuum Surfaces and Films (2 papers)
- Partner nations
- United StatesTaiwanBelgium
In The Last Decade
Anthony Yen
83 papers receiving 673 citations
Peers
Comparison fields: 5 of 52
- Surfaces, Coatings and Films 168
- Electrical and Electronic Engineering 520
- Atomic and Molecular Physics, and Optics 162
- Biomedical Engineering 220
- Condensed Matter Physics 51
Countries citing papers authored by Anthony Yen
This map shows the geographic impact of Anthony Yen's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Anthony Yen with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Anthony Yen more than expected).
Fields of papers citing papers by Anthony Yen
This network shows the impact of papers produced by Anthony Yen. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Anthony Yen. The network helps show where Anthony Yen may publish in the future.
Co-authors
The 25 scholars most cited alongside Anthony Yen, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.
All Works
Showing the 20 most-cited of 93 papers — load more, or switch the sort, to bring in the rest.
| # | Work | ||
|---|---|---|---|
| 1 | 2001 | 111 | |
| 2 | 1989 | 75 | |
| 3 | 1989 | 42 | |
| 4 | 2019 | 41 | |
| 5 | 1990 | 39 | |
| 6 | 1992 | 33 | |
| 7 | 1998 | 26 | |
| 8 | 1992 | 22 | |
| 9 | 1992 | 21 | |
| 10 | 1990 | 13 | |
| 11 | 1989 | 13 | |
| 12 | 1989 | 13 | |
| 13 | 2015 | 11 | |
| 14 | 2020 | 11 | |
| 15 | 2003 | 10 | |
| 16 | 1995 | 10 | |
| 17 | 1992 | 9 | |
| 18 | 2016 | 9 | |
| 19 | 2022 | 8 | |
| 20 | 2001 | 8 |
About Anthony Yen
Anthony Yen is a scholar working on Electrical and Electronic Engineering, Surfaces, Coatings and Films, Biomedical Engineering, Atomic and Molecular Physics, and Optics and Computational Mechanics, having authored 93 papers that have together received 728 indexed citations. Recurring topics across this work include Advancements in Photolithography Techniques (61 papers), Integrated Circuits and Semiconductor Failure Analysis (34 papers), Electron and X-Ray Spectroscopy Techniques (20 papers), Optical Coatings and Gratings (13 papers), Semiconductor materials and devices (10 papers), Nanofabrication and Lithography Techniques (9 papers), Photonic and Optical Devices (8 papers) and Industrial Vision Systems and Defect Detection (6 papers). The work is most often cited by research in Surfaces, Coatings and Films (168 citations), Electrical and Electronic Engineering (520 citations), Atomic and Molecular Physics, and Optics (162 citations), Biomedical Engineering (220 citations) and Condensed Matter Physics (51 citations). Anthony Yen has collaborated with scholars based in United States, Taiwan and Belgium. Frequent co-authors include Henry I. Smith, James D. Klein, K.K. Young, Yao-Ching Ku, C.H. Diaz, D.A. Antoniadis, Mark L. Schattenburg, K. Ismail, W. K. Chu and Stuart F. Cogan. Their work appears in journals such as Microelectronic Engineering, Applied Physics Letters, Journal of Applied Physics, Journal of Micro/Nanolithography MEMS and MOEMS and Journal of Vacuum Science & Technology A Vacuum Surfaces and Films.
Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.