Microelectronic Engineering

170.6k citations
12.0k papers · · active since 1950

Impact in

Papers in

Microelectronic Engineering

11.5k papers receiving 163.5k citations

Peers

Microelectronic Engineering
Comparison fields: 5 of 209
  • Surfaces, Coatings and Films 13.7k
  • Electrical and Electronic Engineering 110.4k
  • Biomedical Engineering 66.8k
  • Structural Biology 2.2k
  • Atomic and Molecular Physics, and Optics 34.5k
Replace Optik with:
Optik China
MRS Bulletin United States
ChemPhysChem Germany
Vacuum China
Surface and Interface Analysis United States
Materials Today China
Nature Chemistry United States
Journal of Micromechanics and Microengineering United States
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films United States
Journal of Electron Spectroscopy and Related Phenomena United States
Microelectronic Engineering relative to Optik China Optik's profile →
Citations per field
00.5×1.5×2×2.4×
Optik · 1×
Citations per year

Countries where authors publish in Microelectronic Engineering

Since Specialization
Citations

This map shows the geographic impact of research published in Microelectronic Engineering. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by papers published in Microelectronic Engineering with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Microelectronic Engineering more than expected).

Fields of papers published in Microelectronic Engineering

Since Specialization
Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers published in Microelectronic Engineering. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers published in Microelectronic Engineering.

About Microelectronic Engineering

The 12.0k papers published in Microelectronic Engineering in the last decades have received a total of 170.6k indexed citations . Papers published in Microelectronic Engineering usually cover Surfaces, Coatings and Films (1.4k papers), Electrical and Electronic Engineering (9.2k papers), Structural Biology (158 papers), Biomedical Engineering (4.3k papers) and Atomic and Molecular Physics, and Optics (2.8k papers) specifically the topics of Semiconductor materials and devices (3.5k papers), Advancements in Photolithography Techniques (2.0k papers), Integrated Circuits and Semiconductor Failure Analysis (1.6k papers), Nanofabrication and Lithography Techniques (1.4k papers), Advancements in Semiconductor Devices and Circuit Design (1.4k papers), Advanced Surface Polishing Techniques (1.0k papers), Copper Interconnects and Reliability (990 papers) and Semiconductor materials and interfaces (854 papers). The most active scholars publishing in Microelectronic Engineering are Yifang Chen, Hiroshi Iwai, Bharat Bhushan, Ş. Altındal, Teruo Fujii, Εvangelos Gogolides, Daniele Ielmini, John Robertson, Ivo W. Rangelow and A. Tataroğlu.

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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