Journal of Micro/Nanolithography MEMS and MOEMS

1.4k papers and 11.6k indexed citations i.

About

The 1.4k papers published in Journal of Micro/Nanolithography MEMS and MOEMS in the last decades have received a total of 11.6k indexed citations. Papers published in Journal of Micro/Nanolithography MEMS and MOEMS usually cover Electrical and Electronic Engineering (1.1k papers), Biomedical Engineering (628 papers) and Surfaces, Coatings and Films (401 papers) specifically the topics of Advancements in Photolithography Techniques (691 papers), Integrated Circuits and Semiconductor Failure Analysis (264 papers) and Nanofabrication and Lithography Techniques (217 papers). The most active scholars publishing in Journal of Micro/Nanolithography MEMS and MOEMS are Chris A. Mack, Burn J. Lin, Yuri Granik, Min Yang, Bin Yang, Peter De Bisschop, Kin Foong Chan, Yasin Ekinci, James W. Thackeray and A. Hassanein.

In The Last Decade

Fields of papers published in Journal of Micro/Nanolithography MEMS and MOEMS

Since Specialization
EngineeringComputer SciencePhysics and AstronomyMathematicsEarth and Planetary SciencesEnergyEnvironmental ScienceMaterials ScienceChemical EngineeringChemistryAgricultural and Biological SciencesVeterinaryDecision SciencesArts and HumanitiesBusiness, Management and AccountingSocial SciencesPsychologyEconomics, Econometrics and FinanceHealth ProfessionsDentistryMedicineBiochemistry, Genetics and Molecular BiologyNeuroscienceNursingImmunology and MicrobiologyPharmacology, Toxicology and Pharmaceutics

This network shows the specialization of papers published in Journal of Micro/Nanolithography MEMS and MOEMS. Nodes represent fields, and links connect fields that are likely to share authors.

Countries where authors publish in Journal of Micro/Nanolithography MEMS and MOEMS

Since Specialization
Total citations of papers

This map shows the geographic distribution of research published in Journal of Micro/Nanolithography MEMS and MOEMS. It shows the number of citations received by papers published by authors working in each country. You can also color the map by specialization and compare the number of papers published in Journal of Micro/Nanolithography MEMS and MOEMS with the expected number of papers based on a country's size and research output (numbers larger than one mean the country's share of papers is larger than expected).

Rankless by CCL
2025