Stuart A. Sieg
Impact in
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- Advancements in Semiconductor Devices and Circuit Design
- Semiconductor materials and devices
- Advancements in Photolithography Techniques
- Low-power high-performance VLSI design
- Plasma Diagnostics and Applications
- 3D IC and TSV technologies
- Radiation Effects in Electronics
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- 2D Materials and Applications
Papers in
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- Advancements in Photolithography Techniques 21
- Advancements in Semiconductor Devices and Circuit Design 6
- Semiconductor materials and devices 1
- 3D IC and TSV technologies 1
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- Nanofabrication and Lithography Techniques 3
- Co-authors
- Luciana Meli (7 shared papers)Martin Burkhardt (3 shared papers)Scott D. Halle (3 shared papers)Nelson M. Felix (9 shared papers)Ravi K. Bonam (2 shared papers)Richard A. Farrell (2 shared papers)Daniel P. Sanders (2 shared papers)Raja Muthinti (2 shared papers)
- Journals
- Journal of Photopolymer Science and Technology (1 paper)Electronics Letters (1 paper)Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena (1 paper)Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE (7 papers)SPIE Newsroom (2 papers)
- Partner nations
- United StatesSouth KoreaJapan
In The Last Decade
Stuart A. Sieg
23 papers receiving 1.1k citations
Stuart A. Sieg's Hit Papers
Peers
Comparison fields: 5 of 29
- Electrical and Electronic Engineering 1k
- Materials Chemistry 89
- Hardware and Architecture 12
- Atomic and Molecular Physics, and Optics 36
- Structural Biology 2
Countries citing papers authored by Stuart A. Sieg
This map shows the geographic impact of Stuart A. Sieg's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Stuart A. Sieg with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Stuart A. Sieg more than expected).
Fields of papers citing papers by Stuart A. Sieg
This network shows the impact of papers produced by Stuart A. Sieg. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Stuart A. Sieg. The network helps show where Stuart A. Sieg may publish in the future.
Co-authors
The 25 scholars most cited alongside Stuart A. Sieg, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.
All Works
Showing the 20 most-cited of 26 papers — load more, or switch the sort, to bring in the rest.
| # | Work | ||
|---|---|---|---|
| 1 | Stacked nanosheet gate-all-around transistor to enable scaling beyond FinFET Hit paper breakdown → | 2017 | 813 |
| 2 | 2016 | 115 | |
| 3 | 2016 | 53 | |
| 4 | 2021 | 50 | |
| 5 | 2016 | 23 | |
| 6 | 2024 | 13 | |
| 7 | 2022 | 12 | |
| 8 | 2016 | 11 | |
| 9 | 2008 | 7 | |
| 10 | 2017 | 6 | |
| 11 | 2016 | 5 | |
| 12 | 2015 | 3 | |
| 13 | 2017 | 3 | |
| 14 | 2021 | 3 | |
| 15 | 2021 | 3 | |
| 16 | 2022 | 3 | |
| 17 | 2022 | 3 | |
| 18 | 2017 | 2 | |
| 19 | 2023 | 2 | |
| 20 | 2016 | 1 |
About Stuart A. Sieg
Stuart A. Sieg is a scholar working on Electrical and Electronic Engineering, Biomedical Engineering, Materials Chemistry, Electronic, Optical and Magnetic Materials and Atomic and Molecular Physics, and Optics, having authored 26 papers that have together received 1.1k indexed citations. Recurring topics across this work include Advancements in Photolithography Techniques (21 papers), Advancements in Semiconductor Devices and Circuit Design (6 papers), Block Copolymer Self-Assembly (3 papers), Nanofabrication and Lithography Techniques (3 papers), Semiconductor materials and devices (1 paper), Copper Interconnects and Reliability (1 paper), Semiconductor materials and interfaces (1 paper) and 3D IC and TSV technologies (1 paper). The work is most often cited by research in Electrical and Electronic Engineering (1k citations), Materials Chemistry (89 citations), Hardware and Architecture (12 citations), Atomic and Molecular Physics, and Optics (36 citations) and Structural Biology (2 citations). Stuart A. Sieg has collaborated with scholars based in United States, South Korea and Japan. Frequent co-authors include Luciana Meli, Martin Burkhardt, Scott D. Halle, Nelson M. Felix, Ravi K. Bonam, Richard A. Farrell, Daniel P. Sanders, Raja Muthinti, Ji‐Soo Park and Anthony Lochtefeld. Their work appears in journals such as Journal of Photopolymer Science and Technology, Electronics Letters, Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE and SPIE Newsroom.
Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.