Anton Heuberger

2.9k citations
43 papers · 2.3k · 1 hit paper · h-index 13

Impact in

    • Nanowire Synthesis and Applications
    • Advanced Surface Polishing Techniques
    • Advanced MEMS and NEMS Technologies
    • Semiconductor materials and devices
    • Advancements in Photolithography Techniques
    • Thin-Film Transistor Technologies

Papers in

Anton Heuberger

40 papers receiving 2.1k citations

Anton Heuberger's Hit Papers

Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I . Orientation Dependence and Behavior of Passivation Layers 1990 · 1.4k citations
1.4k0+12+24Years since publication4008001.2k

Peers

Anton Heuberger
Comparison fields: 5 of 81
  • Biomedical Engineering 1.4k
  • Electrical and Electronic Engineering 1.7k
  • Surfaces, Coatings and Films 190
  • Atomic and Molecular Physics, and Optics 485
  • Radiation 110
Replace Shinji Okazaki with:
Shinji Okazaki Japan
Jane M. Shaw United States
David R. Allee United States
Nobufumi Atoda Japan
N. LaBianca United States
Christie R. K. Marrian United States
Robert L. Kostelak United States
Banqiu Wu United States
Deirdre L. Olynick United States
Stephen A. Rishton United States
Anton Heuberger relative to Shinji Okazaki Japan Shinji Okazaki's profile →
Citations per field
00.5×1.5×1.9×
Shinji Okazaki · 1×
Citations per year

Countries citing papers authored by Anton Heuberger

Since Specialization
Citations

This map shows the geographic impact of Anton Heuberger's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Anton Heuberger with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Anton Heuberger more than expected).

Fields of papers citing papers by Anton Heuberger

Since Specialization
Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Anton Heuberger. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Anton Heuberger. The network helps show where Anton Heuberger may publish in the future.

Co-authors

The 25 scholars most cited alongside Anton Heuberger, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.

Border = papers with Anton Heuberger Line = papers co-authored together Anton Heuberger links everyone, so they are left out of the graph.

All Works

20 of 20 papers shown

Showing the 20 most-cited of 43 papers — load more, or switch the sort, to bring in the rest.

#Work
1
Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I . Orientation Dependence and Behavior of Passivation Layers
Hit paper breakdown →
19901353
2 1990310
3 1982139
4 198895
5 199484
6 198126
7 198524
8 198321
9 198621
10 198621
11 196717
12 197916
13 198314
14 198312
15 199611
16 198910
17 197910
18 19879
19 19859
20 19858

About Anton Heuberger

Anton Heuberger is a scholar working on Surfaces, Coatings and Films, Radiation, Electrical and Electronic Engineering, Biomedical Engineering and Electronic, Optical and Magnetic Materials, having authored 43 papers that have together received 2.3k indexed citations. Recurring topics across this work include Advancements in Photolithography Techniques (29 papers), Electron and X-Ray Spectroscopy Techniques (18 papers), Advanced Surface Polishing Techniques (7 papers), Advanced X-ray Imaging Techniques (6 papers), Nanofabrication and Lithography Techniques (6 papers), Microfluidic and Capillary Electrophoresis Applications (4 papers), Microfluidic and Bio-sensing Technologies (3 papers) and Integrated Circuits and Semiconductor Failure Analysis (3 papers). The work is most often cited by research in Biomedical Engineering (1.4k citations), Electrical and Electronic Engineering (1.7k citations), Surfaces, Coatings and Films (190 citations), Atomic and Molecular Physics, and Optics (485 citations) and Radiation (110 citations). Anton Heuberger has collaborated with scholars based in Germany and Austria. Frequent co-authors include Laszlo Csepregi, Helmut Seidel, Helmut Gustav Baumgärtel, H. T. BETZ, D. Münchmeyer, Henri Michel, W. Ehrfeld, Th. Schnelle, B. Wagner and W. Michael Arnold. Their work appears in journals such as Microelectronic Engineering, Die Naturwissenschaften, Journal of The Electrochemical Society, Polymer Engineering and Science and The European Physical Journal B.

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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