Stefan Decoster

921 citations

62 papers · 652 · h-index 16

Impact in

Electronic, Optical and Magnetic Materials
- Copper Interconnects and Reliability
Electrical and Electronic Engineering top 10%
- Semiconductor materials and devices
- Silicon and Solar Cell Technologies
- Photonic and Optical Devices
- Integrated Circuits and Semiconductor Failure Analysis

Papers in

Electrical and Electronic Engineering 45
- Semiconductor materials and devices 22
- Silicon and Solar Cell Technologies 11
- Advancements in Photolithography Techniques 9
- 3D IC and TSV technologies 7
Electronic, Optical and Magnetic Materials 24
- Copper Interconnects and Reliability 18

Co-authors: A. Vantomme (24 shared papers)J. G. Correia (17 shared papers)L. M. C. Pereira (13 shared papers)João P. Araújo (6 shared papers)M. R. da Silva (9 shared papers)Teresa Mendonça (3 shared papers)M. J. Van Bael (3 shared papers)Bart de Vries (3 shared papers)
Journals: Applied Physics Letters (10 papers)Journal of Applied Physics (6 papers)Physical Review B (4 papers)Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena (2 papers)Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms (2 papers)
Partner nations: Belgium Portugal United States

In The Last Decade

Stefan Decoster

55 papers receiving 634 citations

Peers

Countries citing papers authored by Stefan Decoster

Since Specialization

Citations

This map shows the geographic impact of Stefan Decoster's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Stefan Decoster with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Stefan Decoster more than expected).

Fields of papers citing papers by Stefan Decoster

Since Specialization

Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by Stefan Decoster. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Stefan Decoster. The network helps show where Stefan Decoster may publish in the future.

Co-authors

The 25 scholars most cited alongside Stefan Decoster, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.

Border = papers with Stefan Decoster Line = papers co-authored together Stefan Decoster links everyone, so they are left out of the graph.

All Works

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20 of 20 papers shown

Showing the 20 most-cited of 62 papers — load more, or switch the sort, to bring in the rest.

#	Work
1	Tensile strained GeSn on Si by solid phase epitaxy Applied Physics Letters ·Ruben Lieten, Jin Won Seo, Stefan Decoster, A. Vantomme, S. Peters, Karen C. Bustillo, E. E. Häller, Mariela Menghini, Jean‐Pierre Locquet	2013	58
2	Damascene Benchmark of Ru, Co and Cu in Scaled Dimensions Marleen H. van der Veen, N. Heyler, Olalla Varela Pedreira, Ivan Ciofi, Stefan Decoster, V. Vega Gonzalez, N. Jourdan, Herbert Struyf, Kristof Croes, Christopher J. Wilson, Zs. Tôkei	2018	50
3	Hydrogen-Induced Ostwald Ripening at Room Temperature in a Pd Nanocluster Film Physical Review Letters ·Marcel Di Vece, D. Grandjean, M. J. Van Bael, C. Romero, X. Wang, Stefan Decoster, A. Vantomme, Peter Lievens	2008	48
4	Direct evidence for Sb as a Zn site impurity in ZnO Applied Physics Letters ·(unknown), J. G. Correia, Teresa Mendonça, Stefan Decoster	2009	45
5	Searching for room temperature ferromagnetism in transition metal implanted ZnO and GaN Journal of Applied Physics ·L. M. C. Pereira, João P. Araújo, (unknown), Stefan Decoster, M. J. Van Bael, K. Temst, A. Vantomme	2013	37
6	Patterning challenges for direct metal etch of ruthenium and molybdenum at 32 nm metal pitch and below Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ·Stefan Decoster, Elisabeth Camerotto, Gayle Murdoch, Souvik Kundu, Quoc Toan Le, Zsolt Tökei, Gosia Jurczak, Frédéric Lazzarino	2022	27
7	Lattice location study of implanted In in Ge Journal of Applied Physics ·Stefan Decoster, Bart de Vries, (unknown), J. G. Correia, A. Vantomme	2009	26
8	Implantation-induced damage in Ge: strain and disorder profiles during defect accumulation and recovery Journal of Physics D Applied Physics ·Stefan Decoster, A. Vantomme	2009	26
9	Lattice location study of ion implanted Sn and Sn-related defects in Ge Physical Review B ·Stefan Decoster, Stefaan Cottenier, (unknown), J. G. Correia, A. Vantomme	2010	24
10	Transition Metal Impurities on the Bond-Centered Site in Germanium Physical Review Letters ·Stefan Decoster, Stefaan Cottenier, Bart de Vries, Heike Emmerich, (unknown), J. G. Correia, A. Vantomme	2009	23
11	Mixed Zn and O substitution of Co and Mn in ZnO Physical Review B ·L. M. C. Pereira, (unknown), Stefan Decoster, J. G. Correia, L. M. Amorim, M. R. da Silva, João P. Araújo, A. Vantomme	2011	23
12	Direct identification of interstitial Mn in heavily p-type doped GaAs and evidence of its high thermal stability Applied Physics Letters ·L. M. C. Pereira, (unknown), Stefan Decoster, J. G. Correia, M. R. da Silva, A. Vantomme, João P. Araújo	2011	21
13	SAQP and EUV block patterning of BEOL metal layers on IMEC's iN7 platform Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE ·Joost Bekaert, Paolo Di Lorenzo, Ming Mao, Stefan Decoster, Stéphane Larivière, Joern-Holger Franke, Víctor M. Blanco Carballo, Bogumila Kutrzeba Kotowska, Frédéric Lazzarino, Emily Gallagher, Eric Hendrickx, Philippe Leray, R. Ryoung-han Kim, Greg McIntyre, Paul Colsters, Friso Wittebrood, Joep van Dijk, Mark J. Maslow, Vadim Timoshkov, Ton Kiers	2017	19
14	Electrical characterization of defects introduced in n-type Ge during indium implantation Applied Physics Letters ·F.D. Auret, P.J. Janse van Rensburg, M. Hayes, J.M. Nel, W.E. Meyer, Stefan Decoster, V. Matias, A. Vantomme	2006	17
15	Diluted manganese on the bond-centered site in germanium Applied Physics Letters ·Stefan Decoster, Stefaan Cottenier, (unknown), J. G. Correia, L. M. C. Pereira, C. Lacasta, M. R. da Silva, A. Vantomme	2010	16
16	Evidence of N substitution by Mn in GaN Physical Review B ·L. M. C. Pereira, (unknown), J. G. Correia, Stefan Decoster, L. M. Amorim, M. R. da Silva, João P. Araújo, A. Vantomme	2012	16
17	Stability and diffusion of interstitial and substitutional Mn in GaAs of different doping types Physical Review B ·L. M. C. Pereira, (unknown), Stefan Decoster, J. G. Correia, L. M. Amorim, M. R. da Silva, João P. Araújo, A. Vantomme	2012	13
18	High-Density Patterning of InGaZnO by CH₄: a Comparative Study of RIE and Pulsed Plasma ALE ACS Applied Materials & Interfaces ·Shreya Kundu, Stefan Decoster, Philippe Bézard, Ankit Nalin Mehta, Harold Dekkers, Frédéric Lazzarino	2022	12
19	Experimental evidence of tetrahedral interstitial and bond-centered Er in Ge Applied Physics Letters ·Stefan Decoster, Bart de Vries, (unknown), J. G. Correia, A. Vantomme	2008	11
20	Precise lattice location of substitutional and interstitial Mg in AlN Applied Physics Letters ·L. M. Amorim, (unknown), L. M. C. Pereira, Stefan Decoster, D. J. Silva, M. R. da Silva, A. Gottberg, J. G. Correia, K. Temst, A. Vantomme	2013	11

About Stefan Decoster

Stefan Decoster is a scholar working on Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Atomic and Molecular Physics, and Optics, Materials Chemistry and Surfaces, Coatings and Films, having authored 62 papers that have together received 652 indexed citations. Recurring topics across this work include Semiconductor materials and devices (22 papers), Semiconductor materials and interfaces (19 papers), Copper Interconnects and Reliability (18 papers), ZnO doping and properties (12 papers), Silicon and Solar Cell Technologies (11 papers), Advancements in Photolithography Techniques (9 papers), 3D IC and TSV technologies (7 papers) and Ion-surface interactions and analysis (6 papers). The work is most often cited by research in Electronic, Optical and Magnetic Materials (152 citations), Electrical and Electronic Engineering (432 citations), Materials Chemistry (317 citations), Atomic and Molecular Physics, and Optics (199 citations) and Condensed Matter Physics (70 citations). Stefan Decoster has collaborated with scholars based in Belgium, Portugal and United States. Frequent co-authors include A. Vantomme, J. G. Correia, L. M. C. Pereira, João P. Araújo, M. R. da Silva, Teresa Mendonça, M. J. Van Bael, Bart de Vries, Stefaan Cottenier and K. Temst. Their work appears in journals such as Applied Physics Letters, Journal of Applied Physics, Physical Review B, Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena and Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms.

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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