Sebastian Scheiding

20 papers and 474 indexed citations i.

Sebastian Scheiding has authored 20 papers that have received a total of 474 indexed citations. This includes 15 papers in Biomedical Engineering, 7 papers in Mechanical Engineering and 5 papers in Electrical and Electronic Engineering. The topics of these papers are Chemical Mechanical Polishing in Microelectronics Manufacturing (11 papers), Advanced optical system design (7 papers) and Advanced Measurement and Metrology Techniques (7 papers). Sebastian Scheiding is often cited by papers focused on Chemical Mechanical Polishing in Microelectronics Manufacturing (11 papers), Advanced optical system design (7 papers) and Advanced Measurement and Metrology Techniques (7 papers) and collaborates with scholars based in Germany and United States. Sebastian Scheiding's co-authors include Stefan Risse, Andreas Tünnermann, Andreas Gebhardt, Ramona Eberhardt and Thomas Peschel and has published in prestigious journals such as Optics Express, Journal of Micro/Nanolithography MEMS and MOEMS and Advanced Optical Technologies.