R.S. Muller

11.7k citations
230 papers · 8.3k · 3 hit papers · h-index 51

Impact in

Papers in

R.S. Muller

220 papers receiving 7.8k citations

R.S. Muller's Hit Papers

Etch rates for micromachining processing 1996 · 438 citations
4380+16+32Years since publication100200300400500

Peers

R.S. Muller
Comparison fields: 5 of 103
  • Electrical and Electronic Engineering 6.8k
  • Atomic and Molecular Physics, and Optics 3.1k
  • Biomedical Engineering 3.3k
  • Bioengineering 213
  • Mechanics of Materials 643
Replace S.D. Senturia with:
S.D. Senturia United States
M. Despont Switzerland
Mehran Mehregany United States
H. Rothuizen Switzerland
Albert P. Pisano United States
Victor M. Bright United States
K. Petersen Denmark
Takahito Ono Japan
P. Vettiger Switzerland
P.M. Sarro Netherlands
R.S. Muller relative to S.D. Senturia United States S.D. Senturia's profile →
Citations per field
00.5×1.5×
S.D. Senturia · 1×
Citations per year

Countries citing papers authored by R.S. Muller

Since Specialization
Citations

This map shows the geographic impact of R.S. Muller's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by R.S. Muller with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites R.S. Muller more than expected).

Fields of papers citing papers by R.S. Muller

Since Specialization
Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by R.S. Muller. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by R.S. Muller. The network helps show where R.S. Muller may publish in the future.

Co-authors

The 25 scholars most cited alongside R.S. Muller, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.

Border = papers with R.S. Muller Line = papers co-authored together R.S. Muller links everyone, so they are left out of the graph.

All Works

20 of 20 papers shown

Showing the 20 most-cited of 230 papers — load more, or switch the sort, to bring in the rest.

#Work
1
Device Electronics for Integrated Circuits
Hit paper breakdown →
1977507
2
Etch rates for micromachining processing
Hit paper breakdown →
1996438
3 1998409
4
IC-processed electrostatic micromotors
Hit paper breakdown →
1989383
5 2016240
6 1988224
7 1997208
8 1992172
9 1986171
10 2003128
11 1998123
12 1989122
13 2000119
14 1983118
15 1995114
16 1990109
17 2000109
18 1988107
19 1992106
20 1993106

About R.S. Muller

R.S. Muller is a scholar working on Electrical and Electronic Engineering, Atomic and Molecular Physics, and Optics, Biomedical Engineering, Materials Chemistry and Mechanical Engineering, having authored 230 papers that have together received 8.3k indexed citations. Recurring topics across this work include Advanced MEMS and NEMS Technologies (119 papers), Photonic and Optical Devices (60 papers), Mechanical and Optical Resonators (57 papers), Acoustic Wave Resonator Technologies (31 papers), Semiconductor materials and devices (31 papers), Advancements in Semiconductor Devices and Circuit Design (27 papers), Advanced Surface Polishing Techniques (23 papers) and Semiconductor Lasers and Optical Devices (22 papers). The work is most often cited by research in Electrical and Electronic Engineering (6.8k citations), Atomic and Molecular Physics, and Optics (3.1k citations), Biomedical Engineering (3.3k citations), Bioengineering (213 citations) and Mechanics of Materials (643 citations). R.S. Muller has collaborated with scholars based in United States, Germany and Switzerland. Frequent co-authors include Roger T. Howe, T. I. Kamins, Yu‐Chong Tai, Jack W. Judy, K.Y. Lau, J.M. Bustillo, Carlos H. Mastrangelo, Olav Solgaard, Tai Ye and Albert P. Pisano. Their work appears in journals such as IEEE Transactions on Electron Devices, Journal of Microelectromechanical Systems, Sensors and Actuators A Physical, Solid-State Electronics and Journal of Applied Physics.

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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