R.S. Muller

11.7k citations
239 papers · 9.2k · 4 hit papers · h-index 54

Impact in

Papers in

R.S. Muller

226 papers receiving 8.5k citations

R.S. Muller's Hit Papers

Surface micromachining for microelectromechanical systems 1998 · 479 citations
4790+16+32Years since publication100200300400500

Peers

R.S. Muller
Comparison fields: 5 of 108
  • Electrical and Electronic Engineering 7.5k
  • Atomic and Molecular Physics, and Optics 3.4k
  • Biomedical Engineering 3.7k
  • Bioengineering 235
  • Mechanics of Materials 744
Replace S.D. Senturia with:
S.D. Senturia United States
M. Despont Switzerland
Mehran Mehregany United States
Albert P. Pisano United States
H. Rothuizen Switzerland
Victor M. Bright United States
P. Vettiger Switzerland
Takahito Ono Japan
P.M. Sarro Netherlands
Ute Drechsler Switzerland
R.S. Muller relative to S.D. Senturia United States S.D. Senturia's profile →
Citations per field
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S.D. Senturia · 1×
Citations per year

Countries citing papers authored by R.S. Muller

Since Specialization
Citations

This map shows the geographic impact of R.S. Muller's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by R.S. Muller with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites R.S. Muller more than expected).

Fields of papers citing papers by R.S. Muller

Since Specialization
Physical SciencesHealth SciencesLife SciencesSocial Sciences

This network shows the impact of papers produced by R.S. Muller. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by R.S. Muller. The network helps show where R.S. Muller may publish in the future.

Co-authors

The 25 scholars most cited alongside R.S. Muller, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.

Border = papers with R.S. Muller Line = papers co-authored together R.S. Muller links everyone, so they are left out of the graph.

All Works

20 of 20 papers shown

Showing the 20 most-cited of 239 papers — load more, or switch the sort, to bring in the rest.

#Work
1
Device Electronics for Integrated Circuits
Hit paper breakdown →
1977551
2
Surface micromachining for microelectromechanical systems
Hit paper breakdown →
1998479
3
Etch rates for micromachining processing
Hit paper breakdown →
1996476
4
IC-processed electrostatic micromotors
Hit paper breakdown →
1989411
5 2016247
6 1988242
7 1997219
8 1986183
9 1992182
10 1989141
11 2000137
12 1983137
13 2003130
14 1998127
15 1995120
16 1990117
17 2000115
18 1990114
19 1988113
20 1992110

About R.S. Muller

R.S. Muller is a scholar working on Electrical and Electronic Engineering, Atomic and Molecular Physics, and Optics, Biomedical Engineering, Materials Chemistry and Mechanical Engineering, having authored 239 papers that have together received 9.2k indexed citations. Recurring topics across this work include Advanced MEMS and NEMS Technologies (126 papers), Photonic and Optical Devices (65 papers), Mechanical and Optical Resonators (60 papers), Acoustic Wave Resonator Technologies (31 papers), Semiconductor materials and devices (31 papers), Advancements in Semiconductor Devices and Circuit Design (27 papers), Advanced Surface Polishing Techniques (25 papers) and Semiconductor Lasers and Optical Devices (23 papers). The work is most often cited by research in Electrical and Electronic Engineering (7.5k citations), Atomic and Molecular Physics, and Optics (3.4k citations), Biomedical Engineering (3.7k citations), Bioengineering (235 citations) and Mechanics of Materials (744 citations). R.S. Muller has collaborated with scholars based in United States, Germany and South Korea. Frequent co-authors include Roger T. Howe, T. I. Kamins, Yu‐Chong Tai, Jack W. Judy, K.Y. Lau, J.M. Bustillo, Carlos H. Mastrangelo, Olav Solgaard, Tai Ye and L.-S. Fan. Their work appears in journals such as IEEE Transactions on Electron Devices, Journal of Microelectromechanical Systems, Sensors and Actuators A Physical, Solid-State Electronics and Journal of Applied Physics.

Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.

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