Osamu Suga

70 papers and 409 indexed citations i.

Osamu Suga has authored 70 papers that have received a total of 409 indexed citations. This includes 66 papers in Electrical and Electronic Engineering, 38 papers in Surfaces, Coatings and Films and 21 papers in Industrial and Manufacturing Engineering. The topics of these papers are Advancements in Photolithography Techniques (59 papers), Electron and X-Ray Spectroscopy Techniques (38 papers) and Integrated Circuits and Semiconductor Failure Analysis (33 papers). Osamu Suga is often cited by papers focused on Advancements in Photolithography Techniques (59 papers), Electron and X-Ray Spectroscopy Techniques (38 papers) and Integrated Circuits and Semiconductor Failure Analysis (33 papers) and collaborates with scholars based in Japan. Osamu Suga's co-authors include Toshihiko Tanaka, Tsuneo Terasawa, Takeshi Yamane, Tsuyoshi Amano and Hajime Aoyama and has published in prestigious journals such as Japanese Journal of Applied Physics, Microelectronic Engineering and Journal of Micro/Nanolithography MEMS and MOEMS