Markku Tilli
Impact in
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- Advanced MEMS and NEMS Technologies
- Semiconductor materials and devices
- Silicon and Solar Cell Technologies
- Magnetic Field Sensors Techniques
- Integrated Circuits and Semiconductor Failure Analysis
- Thin-Film Transistor Technologies
Papers in
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- Silicon and Solar Cell Technologies 16
- Semiconductor materials and devices 11
- Thin-Film Transistor Technologies 6
- Advanced MEMS and NEMS Technologies 5
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- Advanced Surface Polishing Techniques 7
- Nanowire Synthesis and Applications 4
- Co-authors
- T. Tuomi (11 shared papers)Mervi Paulasto‐Kröckel (4 shared papers)Vesa Vuorinen (2 shared papers)Väinö Kelhä (6 shared papers)Antti Haapalinna (2 shared papers)Heikki Kuisma (3 shared papers)A. Oja (2 shared papers)Jaakko Saarilahti (2 shared papers)
- Journals
- Journal of Crystal Growth (2 papers)Thin Solid Films (2 papers)Journal of Applied Physics (2 papers)Journal of The Electrochemical Society (2 papers)ACS Omega (1 paper)
- Partner nations
- FinlandGermanyUnited States
In The Last Decade
Markku Tilli
32 papers receiving 365 citations
Peers
Comparison fields: 5 of 57
- Structural Biology 10
- Electrical and Electronic Engineering 272
- Atomic and Molecular Physics, and Optics 102
- Radiation 26
- Surfaces, Coatings and Films 21
Countries citing papers authored by Markku Tilli
This map shows the geographic impact of Markku Tilli's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Markku Tilli with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Markku Tilli more than expected).
Fields of papers citing papers by Markku Tilli
This network shows the impact of papers produced by Markku Tilli. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Markku Tilli. The network helps show where Markku Tilli may publish in the future.
Co-authors
The 25 scholars most cited alongside Markku Tilli, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.
All Works
Showing the 20 most-cited of 33 papers — load more, or switch the sort, to bring in the rest.
| # | Work | ||
|---|---|---|---|
| 1 | 2007 | 77 | |
| 2 | 2017 | 64 | |
| 3 | 1992 | 24 | |
| 4 | 1992 | 24 | |
| 5 | 2015 | 17 | |
| 6 | 1979 | 15 | |
| 7 | “MEMS lithography” in Handbook of silicon based MEMS materials and technologies | 2010 | 15 |
| 8 | 1985 | 12 | |
| 9 | 2013 | 12 | |
| 10 | Chapter 4 – Silicon Wafers: Preparation and Properties | 2015 | 12 |
| 11 | Handbook of Silicon Based MEMS Materials and Technologies: Second Edition | 2015 | 11 |
| 12 | 1993 | 10 | |
| 13 | 2007 | 10 | |
| 14 | 2020 | 9 | |
| 15 | 2015 | 8 | |
| 16 | 2020 | 8 | |
| 17 | 1989 | 7 | |
| 18 | 1978 | 6 | |
| 19 | 1986 | 6 | |
| 20 | 1978 | 6 |
About Markku Tilli
Markku Tilli is a scholar working on Electrical and Electronic Engineering, Biomedical Engineering, Atomic and Molecular Physics, and Optics, Materials Chemistry and Mechanical Engineering, having authored 33 papers that have together received 395 indexed citations. Recurring topics across this work include Silicon and Solar Cell Technologies (16 papers), Semiconductor materials and devices (11 papers), Advanced Surface Polishing Techniques (7 papers), Thin-Film Transistor Technologies (6 papers), Microstructure and Mechanical Properties of Steels (5 papers), Magnetic Properties and Applications (5 papers), Advanced MEMS and NEMS Technologies (5 papers) and Nanowire Synthesis and Applications (4 papers). The work is most often cited by research in Structural Biology (10 citations), Electrical and Electronic Engineering (272 citations), Atomic and Molecular Physics, and Optics (102 citations), Radiation (26 citations) and Surfaces, Coatings and Films (21 citations). Markku Tilli has collaborated with scholars based in Finland, Germany and United States. Frequent co-authors include T. Tuomi, Mervi Paulasto‐Kröckel, Vesa Vuorinen, Väinö Kelhä, Antti Haapalinna, Heikki Kuisma, A. Oja, Jaakko Saarilahti, Panu Pekko and H. Kattelus. Their work appears in journals such as Journal of Crystal Growth, Thin Solid Films, Journal of Applied Physics, Journal of The Electrochemical Society and ACS Omega.
Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.