Markku Tilli
Impact in
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- Advanced MEMS and NEMS Technologies
- Semiconductor materials and devices
- Silicon and Solar Cell Technologies
- Magnetic Field Sensors Techniques
- Integrated Circuits and Semiconductor Failure Analysis
- Thin-Film Transistor Technologies
Papers in
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- Silicon and Solar Cell Technologies 10
- Semiconductor materials and devices 8
- Thin-Film Transistor Technologies 5
- Advanced MEMS and NEMS Technologies 4
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- Advanced Surface Polishing Techniques 4
- Co-authors
- T. Tuomi (11 shared papers)Mervi Paulasto‐Kröckel (3 shared papers)Vesa Vuorinen (2 shared papers)Väinö Kelhä (6 shared papers)Heikki Seppä (2 shared papers)A. Oja (2 shared papers)Jaakko Saarilahti (2 shared papers)H. Kattelus (2 shared papers)
- Journals
- Journal of Crystal Growth (2 papers)Journal of The Electrochemical Society (2 papers)Thin Solid Films (2 papers)Journal of Applied Physics (2 papers)Journal of materials research/Pratt's guide to venture capital sources (1 paper)
- Partner nations
- FinlandGermanyUnited States
In The Last Decade
Markku Tilli
24 papers receiving 280 citations
Peers
Comparison fields: 5 of 53
- Structural Biology 6
- Electrical and Electronic Engineering 208
- Atomic and Molecular Physics, and Optics 80
- Surfaces, Coatings and Films 16
- Radiation 19
Countries citing papers authored by Markku Tilli
This map shows the geographic impact of Markku Tilli's research. It shows the number of citations coming from papers published by authors working in each country. You can also color the map by specialization and compare the number of citations received by Markku Tilli with the expected number of citations based on a country's size and research output (numbers larger than one mean the country cites Markku Tilli more than expected).
Fields of papers citing papers by Markku Tilli
This network shows the impact of papers produced by Markku Tilli. Nodes represent research fields, and links connect fields that are likely to share authors. Colored nodes show fields that tend to cite the papers produced by Markku Tilli. The network helps show where Markku Tilli may publish in the future.
Co-authors
The 25 scholars most cited alongside Markku Tilli, linked wherever they have co-authored with each other. Click a name or a connecting line to browse the papers they share.
All Works
Showing the 20 most-cited of 25 papers — load more, or switch the sort, to bring in the rest.
| # | Work | ||
|---|---|---|---|
| 1 | 2007 | 70 | |
| 2 | 2017 | 60 | |
| 3 | 1992 | 19 | |
| 4 | 1992 | 16 | |
| 5 | “MEMS lithography” in Handbook of silicon based MEMS materials and technologies | 2010 | 13 |
| 6 | 1979 | 12 | |
| 7 | 2013 | 12 | |
| 8 | 1985 | 11 | |
| 9 | Handbook of Silicon Based MEMS Materials and Technologies: Second Edition | 2015 | 11 |
| 10 | 1993 | 10 | |
| 11 | 2007 | 8 | |
| 12 | 1989 | 7 | |
| 13 | 1986 | 6 | |
| 14 | 1978 | 5 | |
| 15 | 2019 | 5 | |
| 16 | 1984 | 4 | |
| 17 | 1979 | 4 | |
| 18 | 1978 | 4 | |
| 19 | 1979 | 4 | |
| 20 | 1980 | 2 |
About Markku Tilli
Markku Tilli is a scholar working on Electrical and Electronic Engineering, Biomedical Engineering, Mechanical Engineering, Electronic, Optical and Magnetic Materials and Materials Chemistry, having authored 25 papers that have together received 289 indexed citations. Recurring topics across this work include Silicon and Solar Cell Technologies (10 papers), Semiconductor materials and devices (8 papers), Magnetic Properties and Applications (5 papers), Microstructure and Mechanical Properties of Steels (5 papers), Thin-Film Transistor Technologies (5 papers), Advanced MEMS and NEMS Technologies (4 papers), Advanced Surface Polishing Techniques (4 papers) and Electron and X-Ray Spectroscopy Techniques (3 papers). The work is most often cited by research in Structural Biology (6 citations), Electrical and Electronic Engineering (208 citations), Atomic and Molecular Physics, and Optics (80 citations), Surfaces, Coatings and Films (16 citations) and Radiation (19 citations). Markku Tilli has collaborated with scholars based in Finland, Germany and United States. Frequent co-authors include T. Tuomi, Mervi Paulasto‐Kröckel, Vesa Vuorinen, Väinö Kelhä, Heikki Seppä, A. Oja, Jaakko Saarilahti, H. Kattelus, Panu Pekko and Tor Meinander. Their work appears in journals such as Journal of Crystal Growth, Journal of The Electrochemical Society, Thin Solid Films, Journal of Applied Physics and Journal of materials research/Pratt's guide to venture capital sources.
Rankless uses publication and citation data sourced from OpenAlex, an open and comprehensive bibliographic database. While OpenAlex provides broad and valuable coverage of the global research landscape, it—like all bibliographic datasets—has inherent limitations. These include incomplete records, variations in author disambiguation, differences in journal indexing, and delays in data updates. As a result, some metrics and network relationships displayed in Rankless may not fully capture the entirety of a scholar's output or impact.