Journal of Micro/Nanolithography MEMS and MOEMS

1.4k papers and 11.2k indexed citations i.

About

The 1.4k papers published in Journal of Micro/Nanolithography MEMS and MOEMS in the last decades have received a total of 11.2k indexed citations. Papers published in Journal of Micro/Nanolithography MEMS and MOEMS usually cover Electrical and Electronic Engineering (1.1k papers), Biomedical Engineering (628 papers) and Surfaces, Coatings and Films (401 papers) specifically the topics of Advancements in Photolithography Techniques (690 papers), Integrated Circuits and Semiconductor Failure Analysis (264 papers) and Nanofabrication and Lithography Techniques (217 papers). The most active scholars publishing in Journal of Micro/Nanolithography MEMS and MOEMS are Yasin Ekinci, Chris A. Mack, Andreas Erdmann, Roel Gronheid and Alok Vaid.

In The Last Decade

Rankless by CCL
2025