Yu. D. Filatov

46 papers and 518 indexed citations i.

Yu. D. Filatov has authored 46 papers that have received a total of 518 indexed citations. This includes 40 papers in Biomedical Engineering, 19 papers in Mechanical Engineering and 18 papers in Computational Mechanics. The topics of these papers are Chemical Mechanical Polishing in Microelectronics Manufacturing (33 papers), Advanced machining processes and optimization (16 papers) and Laser Material Processing Techniques (15 papers). Yu. D. Filatov is often cited by papers focused on Chemical Mechanical Polishing in Microelectronics Manufacturing (33 papers), Advanced machining processes and optimization (16 papers) and Laser Material Processing Techniques (15 papers) and collaborates with scholars based in Ukraine, Germany and France. Yu. D. Filatov's co-authors include Uwe Heisel, Michael Storchak, Guy Monteil, A. Boyaryntsev and M. A. Kondratenko and has published in prestigious journals such as Optical Engineering, Production Engineering and Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena.