W. Kleinfelder

5 papers and 255 indexed citations i.

W. Kleinfelder has authored 5 papers that have received a total of 255 indexed citations. This includes 3 papers in Electrical and Electronic Engineering, 2 papers in Biomedical Engineering and 2 papers in Computational Mechanics. The topics of these papers are Silicon and Solar Cell Technologies (2 papers), Chemical Mechanical Polishing in Microelectronics Manufacturing (2 papers) and Ion-surface interactions and analysis (2 papers). W. Kleinfelder is often cited by papers focused on Silicon and Solar Cell Technologies (2 papers), Chemical Mechanical Polishing in Microelectronics Manufacturing (2 papers) and Ion-surface interactions and analysis (2 papers) and collaborates with scholars based in United States. W. Kleinfelder's co-authors include Duncan A. Buell, Jeffrey M. Arnold, David P. Kennedy, J. F. Ziegler and P. C. Murley and has published in prestigious journals such as IBM Journal of Research and Development and Canadian Journal of Physics.