Takayuki Uchiyama

41 papers and 445 indexed citations i.

Takayuki Uchiyama has authored 41 papers that have received a total of 445 indexed citations. This includes 34 papers in Electrical and Electronic Engineering, 18 papers in Biomedical Engineering and 6 papers in Surfaces, Coatings and Films. The topics of these papers are Advancements in Photolithography Techniques (19 papers), Chemical Mechanical Polishing in Microelectronics Manufacturing (13 papers) and Integrated Circuits and Semiconductor Failure Analysis (9 papers). Takayuki Uchiyama is often cited by papers focused on Advancements in Photolithography Techniques (19 papers), Chemical Mechanical Polishing in Microelectronics Manufacturing (13 papers) and Integrated Circuits and Semiconductor Failure Analysis (9 papers) and collaborates with scholars based in Japan, The Netherlands and Australia. Takayuki Uchiyama's co-authors include Varun Vohra, Matsuhiko Nishizawa, Kunihiko Kasama, Seiji Nagahara and S. Iida and has published in prestigious journals such as Applied Physics Letters, Langmuir and Journal of The Electrochemical Society.