Carl G. Chen

19 papers and 428 indexed citations i.

Carl G. Chen has authored 19 papers that have received a total of 428 indexed citations. This includes 12 papers in Mechanical Engineering, 10 papers in Electrical and Electronic Engineering and 8 papers in Biomedical Engineering. The topics of these papers are Advanced Measurement and Metrology Techniques (12 papers), Chemical Mechanical Polishing in Microelectronics Manufacturing (8 papers) and Optical measurement and interference techniques (5 papers). Carl G. Chen is often cited by papers focused on Advanced Measurement and Metrology Techniques (12 papers), Chemical Mechanical Polishing in Microelectronics Manufacturing (8 papers) and Optical measurement and interference techniques (5 papers) and collaborates with scholars based in United States. Carl G. Chen's co-authors include Mark L. Schattenburg, Paul T. Konkola, Ralf K. Heilmann, Chulmin Joo and G. S. Pati and has published in prestigious journals such as Nanotechnology and Journal of the Optical Society of America A.