Allen Y. Yi

138 papers and 2.9k indexed citations i.

Allen Y. Yi has authored 138 papers that have received a total of 2.9k indexed citations. This includes 117 papers in Biomedical Engineering, 43 papers in Mechanical Engineering and 38 papers in Computational Mechanics. The topics of these papers are Advanced optical system design (72 papers), Chemical Mechanical Polishing in Microelectronics Manufacturing (47 papers) and Nanofabrication and Lithography Techniques (37 papers). Allen Y. Yi is often cited by papers focused on Advanced optical system design (72 papers), Chemical Mechanical Polishing in Microelectronics Manufacturing (47 papers) and Nanofabrication and Lithography Techniques (37 papers) and collaborates with scholars based in United States, China and Germany. Allen Y. Yi's co-authors include Fritz Klocke, Lin Zhang, Jianfeng Yu and Lijuan Su and has published in prestigious journals such as Applied Physics Letters, Journal of Applied Physics and Optics Letters.